CD error sensitivity to `sub-killer' defects at k1 near 0.4

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue II, 1999, Pages 722-733

  Chen, J Fung ^a   Diachun, Nathan ^a   Nakagawa, Kent H ^a   Socha, Robert ^a   Dusa, Mircea ^a   Laidig, Tom ^a   Wampler, Kurt E ^a   Caldwell, Roger ^a   van den Broeke, Doug ^a  

^a Systems Inc Sunnyvale CA USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ERROR ANALYSIS; SENSITIVITY ANALYSIS;

CRITICAL DIMENSION (CD) CONTROL; DEFECT SENSITIVITY MONITOR (DSM); OPTICAL PROXIMITY CORRECTION (OPC);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032628397     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350858     Document Type: Conference Paper

References (7)