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Volumn 47, Issue 6, 1999, Pages 1749-1756
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Critical radius for interface separation of a compressively stressed film from a rough surface
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
CRACKS;
ELASTIC MODULI;
FRACTURE;
INTERFACES (MATERIALS);
INTERFACIAL ENERGY;
NUMERICAL METHODS;
OXIDATION;
RESIDUAL STRESSES;
STRAIN;
SURFACE ROUGHNESS;
THICKNESS MEASUREMENT;
COMPRESSIVELY STRESSED FILM;
ELASTIC STRAIN;
FILM STRESS;
FILM THICKNESS;
FRACTURE RESISTANCE;
INTERFACE SEPARATION;
THIN FILMS;
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EID: 0032627905
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(99)00078-6 Document Type: Article |
Times cited : (71)
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References (9)
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