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Volumn 22, Issue 5, 1999, Pages 79-80,-82,-84
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Consistency and cost are key to gas management
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACCIDENT PREVENTION;
CONTAMINATION;
COST EFFECTIVENESS;
ENVIRONMENTAL PROTECTION;
INDUSTRIAL PLANTS;
MANAGEMENT;
NITROGEN;
OUTSOURCING;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILANES;
BULK DELIVERY;
CONTAMINATION CONTROL;
GAS HANDLING SYSTEM;
GAS MANAGEMENT;
GAS SUPPLY;
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EID: 0032627648
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (9)
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References (0)
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