Ga2O3 thin films for high-temperature gas sensors

Applied Surface Science

Volumn 142, Issue 1, 1999, Pages 188-191

  Ogita, M ^a   Saika, N ^a   Nakanishi, Y ^a   Hatanaka, Y ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHEMICAL SENSORS; COMPOSITION; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY OF SOLIDS; GALLIUM COMPOUNDS; HIGH TEMPERATURE PROPERTIES; MAGNETRON SPUTTERING; OXYGEN; SURFACES; X RAY DIFFRACTION ANALYSIS;

GALLIUM OXIDE; HIGH TEMPERATURE GAS SENSORS; METAL OXIDE; RADIO FREQUENCY MAGNETRON SPUTTERING; SURFACE CONTROL TYPE SENSORS;

THIN FILMS;

EID: 0032626809     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00714-4     Document Type: Article

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