Broadband planarizing anti-reflective coating for i-line, DUV and 193 nm microlithographic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue II, 1999, Pages 884-894

  Shao, Xie ^a   Lamb III, Jim E ^a   Claypool, James ^a   Simmons, Bill ^a   Murphy, Earnie ^a  

^a BREWER SCIENCE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (OPTICAL); OPTICAL FILMS; PHOTORESISTS; PLASMA ETCHING; SOLVENTS;

BROADBAND BOTTOM ANTIREFLECTIVE COATINGS (BARC);

ANTIREFLECTION COATINGS;

EID: 0032626756     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350877     Document Type: Conference Paper

References (5)