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Volumn 263-264, Issue , 1999, Pages 84-86
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SAW diagnostics of GaAs surface structure
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC WAVE PROPAGATION;
CRYSTAL ORIENTATION;
DEFORMATION;
MORPHOLOGY;
OXIDES;
SURFACE STRUCTURE;
THIN FILMS;
TRANSDUCERS;
SURFACE ACOUSTIC WAVE PROPAGATION;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0032626736
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(98)01199-5 Document Type: Article |
Times cited : (3)
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References (4)
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