Geometrical correction of the e-beam proximity effect for raster scan systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue I, 1999, Pages 100-105

  Belic, N ^a   Eisenmann, H ^a   Hartmann, H ^a   Waas, T ^a  

^a aiss GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; COMPUTATIONAL METHODS; ELECTRON SCATTERING; FUNCTIONS; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; OPTIMIZATION;

ELECTRON BEAM PROXIMITY EFFECTS; RASTER SCAN SYSTEMS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0032625406     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351082     Document Type: Conference Paper

References (4)