Modal analysis of the SCALPEL mask using experimental and numerical methods

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue II, 1999, Pages 556-567

  Semke, William H ^a   Schlax, Michael P ^a   Engelstad, Roxann L ^a   Lovell, Edward G ^a   Liddle, J Alexander ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING; COMPUTER SIMULATION; ELECTRON SCATTERING; FIBER OPTIC SENSORS; FINITE ELEMENT METHOD; INTERFEROMETERS; MASKS; MATHEMATICAL MODELS; MODAL ANALYSIS; NANOTECHNOLOGY; OSCILLATIONS; VIBRATIONS (MECHANICAL);

SCANNING LASER VIBROMETERS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0032625393     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351129     Document Type: Conference Paper

References (15)