Plasma deposition of silicon clusters: A way to produce silicon thin films with medium-range order?

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 855-865

  Roca i Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; PLASMA APPLICATIONS; SEMICONDUCTING FILMS; SILANES; SILICON SOLAR CELLS; THIN FILMS; TRANSPORT PROPERTIES;

HYDROGENATED SILICON; PLASMA DEPOSITION;

SEMICONDUCTING SILICON;

EID: 0032625051     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (45)