Determination of the transmission and correction of electron spectrometers, based on backscattering and elastic reflection of electrons

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 101-105

  Gergely, G ^a   Menyhard, M ^a   Sulyok, A ^a   Toth, J ^b   Varga, D ^b   Tokesi, K ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF NUCLEAR RESEARCH ATOMKI   (Hungary)

Author keywords

Corrections; Electron spectrometer parameters

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BACKSCATTERING; ELECTRON ENERGY LEVELS; ELECTRONS; SPECTRUM ANALYSIS; SURFACES;

ELASTIC CURRENT; ELASTIC PEAK INTENSITY; ELASTIC REFLECTION COEFFICIENT;

PARTICLE SPECTROMETERS;

EID: 0032624755     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00774-0     Document Type: Article

References (27)

1. D. Briggs, M.P. Seah, Practical Surface Analysis, Vol. 1, Wiley, 1990.
2. M.P. Seah et al., J. Electron Spectrosc. Rel. Phenom. 71 (1995) 191.
3. M.P. Seah et al., J. Electron Spectrosc. Rel. Phenom. 42 (1987) 255.
4. M.P. Seah et al., J. Electron Spectrosc. Rel. Phenom. 48 (1989) 209.
5. ASTM Standard E 1016-90.
6. L. Kover, D. Varga, I. Cserny, J. Toth, K. Tokesi, Surf. Interface Anal. 19 (1992) 9.
7. K. Goto, N. Sakakibara, Y. Sakai, Microbeam Anal. 2 (1993) 123.
8. M.P. Seah, J. Electron Spectrosc. Rel. Phenom. 50 (1990) 137.
9. G. Gergely, M. Menyhard, A. Sulyok, A. Jablonski, P. Mrozek, Acta Phys. Hung. 57 (1985) 139.
10. K. Goto, J. Surface Anal. 1 (1995) 162.
11. K. Goto, Y. Takaichi, Hyemenkagaku 17 (1996) 417.
12. Y. Takeichi, K. Goto, Surf. Interface Anal. 25 (1997) 17.
13. K. Yoshihara, M. Yoshitake, J. Vac. Sci. Technol. A 12 (1994) 2342.
14. G. Gergely, Surf. Interface Anal. 3 (1981) 201.
15. G. Gergely, Scanning 8 (1986) 203.
16. R. Schmid, K.H. Gaukler, H. Seiler, in: O. Johari (Ed.), Scanning Electron Microscopy, Vol. 2, SEM Chicago, 1983, p. 501.
17. W. Dolinski, S. Mroz, J. Palczynski, B. Gruzza, P. Bondot, A. Porte, Acta Phys. Polon. A 81 (1992) 193.
18. A. Sulyok, G. Gergely, B. Gruzza, L. Bideux, Vacuum 45 (1994) 325.
19. F. Golek, W. Dolinski, Phys. Status Solidi A 151 (1995) K37.
20. A. Fink, Dissertaton, Eberhard-Karl Univ., Tubingen, 1991.
21. A. Koch, Dissertation, Eberhard-Karl Univ., Tubingen 1996.
22. G. Gergely, L. Guczi, A. Jablonski, B. Lesiak, A. Sulyok, Z. Zsoldos, Acad. Mining Met. Proc. in: S. Jasienska (Ed.), Proc. 12 ICXOM, Cracow, Poland, 1989, p. 505.
23. K. Tokesi, T. Mukoyama, Bull. Inst. Chem. Res. Kyoto Univ. 72 (1994) 352.
24. K. Tokesi, T. Mukoyama, Surf. Rev. Lett. 4 (1997) 955.
25. K. Tokesi, A. Nemethy, L. Kover, D. Varga, J. Appl. Phys. 79 (1996) 3763.
26. S. Tanuma, C.J. Powell, D.R. Penn, Surf. Interface Anal. 17 (1991) 911.
27. S. Tougaard, J. Kraer, Phys. Rev. B 43 (1991) 1651.