High power extreme ultraviolet source based on a Z-pinch

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3676, Issue II, 1999, Pages 697-701

  McGeoch, Malcolm W ^a  

^a PLEX LLC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY STORAGE; MIRRORS; OPTIMIZATION; SPECTRUM ANALYSIS; ULTRAVIOLET RADIATION; XENON;

EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); Z-PINCH;

PHOTOLITHOGRAPHY;

EID: 0032624671     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.351154     Document Type: Conference Paper

References (5)