Composite microhardness of quartz-Al structures

Crystal Research and Technology

Volumn 34, Issue 3, 1999, Pages 391-395

  Trifonova, Emilia P ^b   Lasarova, Velitchka ^a   Spassov, Lozan ^a   Efremova, Nikoleta ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; FILM PREPARATION; INTERFACES (MATERIALS); MICROHARDNESS; QUARTZ; RAPID THERMAL ANNEALING; SILICA; SUBSTRATES;

COMPOSITE MICROHARDNESS;

COMPOSITE MATERIALS;

EID: 0032624495     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4079(199903)34:3<391::AID-CRAT391>3.0.CO;2-M     Document Type: Article

References (14)

1. th Greek-Bulgarian Symp. on Semicond. Physics, Oct. 16-20, 1995, Thessaloniki, Greece, p. 220.
2. BLATTNER, R. J., BRAUNDMEIER, A. J., JR. : J. Vac. Sci. Technol. 20 (1982) 320.
3. BÜCKLE, H.: The Science of Hardness Testing and its Research Applications, Eds. J. H. Westbrook, H. Conrad, American Society for Metals, Metals Park, OH, 1973, p. 481.
4. GILMAN, J. J.: The Science of Hardness Testing and its Research Applications, Eds. J. H. Westbrook, H. Conrad, American Society for Metals, Metals Park, OH, 1973, pp. 65, 66, 73.
5. GORYUNOVA, N. A., BORSHCHEVSKII, A. S., TRETIAKOV, D. N.: Semiconductors and Semimetals: Physics of III-V Compounds, Eds. R. K. Willardson, A. C. Beer, Academic Press, New York 1968, 4, p. 3.
6. KATZ, L. E.: Technology of Integrated Circuits, Ed. S. M. Sze, part I, ch. 4.
7. KURNOSOV, A. I.: Materials for Semiconductor Devices and Integrated Circuits, Vysshaya Shkola, Moscow 1980, p. 139 (in Russian).
8. LASAROVA, V., BESHKOV, G., SPASSOV, L.: Vacuum 47 (1996) 1329.
9. MATTOX, D. M.: Thin Solid Films 18 (1973) 173.
10. POLLOCK, H. M., MAUGIS, D., BARQUINS, M.: Microindentation Techniques in Materials Science and Engineering, Eds. P. J. Blau, B. R. Lawn, American Society for Testing and Materials, Philadelphia 1986, p. 47.
11. STRAUSSER, Y. E., SCHEIBNER, E. J., JOHANNESSEN, J. S.: Thin Solid Films 52 (1978) 203.
12. THUN, R. E., VAJDA, E. S.: Microelectronics. Theory, Design and Fabrication, Ed. E. Keonjian, McGrow-Hill Book Company, Inc., New York, Toronto, London 1963, ch. 5.
13. TSAI, J. C.: Technology of Integrated Circuits, Ed. S. M. Sze, part I, ch.5.
14. WAGENDRISTEL, A., BANGERT, H., CAI, X., KAMINITSCHEK, A.: Thin Solid Films 154 (1987) 199.