Application of spatial signature analysis to electrical test data: Validation study

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue II, 1999, Pages 530-541

  Karnowski, Thomas P ^a   Tobin, Kenneth W ^a   Gleason, Shaun S ^a   Lakhani, Fred ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CRYSTAL DEFECTS; DATA REDUCTION; DYNAMIC RANDOM ACCESS STORAGE; FUZZY SETS; MICROPROCESSOR CHIPS; NEURAL NETWORKS; OPTICAL CHARACTER RECOGNITION; SILICON WAFERS;

SPATIAL SIGNATURE ANALYSIS (SSA); WAFERMAP ANALYSIS;

SEMICONDUCTOR DEVICE TESTING;

EID: 0032624345     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350840     Document Type: Conference Paper

References (11)