Characterization of a semiconductor detector and its application for ion diagnostics using a novel ion energy spectrometer

Review of Scientific Instruments

Volumn 70, Issue 1 II, 1999, Pages 857-860

  Sakamoto, Y ^a,b   Cho, T ^a   Hirata, M ^a   Kohagura, J ^a   Sasuga, T ^a   Nishizawa, Y ^a   Numakura, T ^a   Minami, R ^a   Nakashima, Y ^a   Tamano, T ^a   Yatsu, K ^a   Miyoshi, S ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATIC DEVICES; ENERGY TRANSFER; ION BEAMS; IONIC STRENGTH; MAGNETIC FIELDS; PARTICLE SPECTROMETERS; PLASMA DIAGNOSTICS; SEMICONDUCTOR DEVICES; SILICON WAFERS;

ELECTROSTATIC ION ENERGY SPECTROMETER; ION DIAGNOSTICS; MONOENERGETIC ION BEAM LINE; SEMICONDUCTOR ION DETECTOR;

PARTICLE DETECTORS;

EID: 0032621925     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149279     Document Type: Article

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