Industrial ion sources and their application for DLC coating

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 338-341

  Shabalin, A ^a   Amann, M ^a   Kishinevsky, M ^a   Nauman, K ^a   Quinn, C ^a  

^a Advanced Energy Industries   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; CORROSION RESISTANCE; DEPOSITION; ENERGY EFFICIENCY; INDUSTRIAL DIAMONDS; MAGNETIC FIELD EFFECTS; OXYGEN; PROTECTIVE COATINGS;

ACCELERATION ZONE; ADVANCED ENERGY; SOVIET UNION;

ION SOURCES;

EID: 0032621179     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)