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Volumn , Issue , 1999, Pages 250-254
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Ion-assisted deposition of E-gun evaporated ITO films at low substrate temperatures
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Author keywords
[No Author keywords available]
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Indexed keywords
COATING TECHNIQUES;
CONDUCTIVE FILMS;
ELECTRIC PROPERTIES;
ION SOURCES;
LIQUID CRYSTAL DISPLAYS;
MAGNETRON SPUTTERING;
OPTICAL PROPERTIES;
SEMICONDUCTING INDIUM COMPOUNDS;
SUBSTRATES;
TEMPERATURE;
THIN FILMS;
ELECTROLUMINESCENT BACK LIGHTING;
INDIUM TIN OXIDE;
INTERFERENCE COATINGS;
ION BEAM ASSISTED DEPOSITION;
LOW EMISSIVITY COATING;
OPTICALLY TRANSPARENT CONDUCTIVE FILMS;
PLETHORA;
THERMAL EVAPORATION;
TRANSPARENT TOUCH PANELS;
SPUTTER DEPOSITION;
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EID: 0032620916
PISSN: 07375921
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (8)
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References (15)
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