Growth of SiC protective coating layers on graphite using single molecular precursors

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 368-372

  Park, S J ^a   Han, J G ^a   Boo, J H ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; GROWTH (MATERIALS); MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THERMOOXIDATION; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIETHYLMETHYLSILANE; HEXAMETHYLDISILANE; KNOOP MICROHARDNESS TESTER; OPTICAL EMISSION SPECTROSCOPY; SINGLE MOLECULAR PRECURSOR; THERMAL EXPANSION COEFFICIENT;

GRAPHITE;

EID: 0032620697     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)