Phase-step calibration for phase-stepped interferometry

Applied Optics

Volumn 38, Issue 16, 1999, Pages 3549-3555

  van Brug, Hedser ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ERROR ANALYSIS; IMAGE ANALYSIS; MATHEMATICAL MODELS; OPTICAL CORRELATION; POLYNOMIALS;

CARRE ALGORITHM; FRINGE AVERAGING; FRINGE TRACKING; IMAGE ANALYSIS; PHASE-STEPPED INTERFEROMETRY; ZERNIKE POLYNOMIAL;

INTERFEROMETRY;

EID: 0032615081     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.003549     Document Type: Article

References (7)

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4. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm,” Appl. Opt. 26, 2504-2506 (1987).
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6. H. van Brug, “Zernike polynomials as basis for wave-front fitting in lateral shearing interferometry,” Appl. Opt. 36, 2788-2790 (1997).
7. H. van Brug, “Efficient Cartesian representation of Zernike polynomials in computer memory,” in Fifth International Topical Meeting on Education and Training in Optics, C. H. F. Velzel, ed., Proc. SPIE 3190, 382-392 (1997).