Thermal analysis of metalorganic complexes of copper for evaluation as CVD precursors

Journal of Thermal Analysis and Calorimetry

Volumn 55, Issue 1, 1999, Pages 259-270

  Devi, Anjana ^a   Shivashankar, S A ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

CVD; Metalorganic precursors; Thermogravimetry

Indexed keywords

KETONES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SUBLIMATION; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS;

LIGANDS; METALORGANIC PRECURSORS;

COPPER COMPOUNDS;

EID: 0032613751     PISSN: 14182874     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1010173230897     Document Type: Article

References (13)

1. J. L. Vossen and W. Kern in Thin Film Processes-II, Academic Press, San Diego, 1991 (Chapter 3, p.258).
2. F. Maury, Chem. Vap. Deposition, 2 (1996) 113.
3. T. T. Kodas and M. J. Hampden-Smith in The Chemistry of Metal CVD, VCH Publishers Inc. Weinheim, 1994 (Chapter 4 and 5 and references therein).
4. T. H. Stumm and H. van den Bergh, Mater. Sci. Eng. B23 (1994) 48.
5. T. Hashimoto and H. Koinuma, J. Mater. Res., 7 (1992) 1.
6. H. Zama and S. Oda, Jpn. J. Appl. Phys., 29 (1990) L1072.
7. A. Devi, J. Goswami, R. Lakshini, S. A. Shivashankar and S. Chandrasekaran, J. Mater. Res. (March 1998).
8. K. J. Eisentraut and R. E. Sievers, J. Inorg. Nucl. Chemistry, 29 (1967) 1931.
9. E. W. Berg and N. M. Herrera, Anal. Chem. Acta, 60 (1972) 117.
10. T. Maruyama and Y. Ikuta, J. Mater. Sci., 28 (1993) 5540.
11. A. Devi, Ph. D. Thesis, Indian Institute of Science, Bangalore, 1997.
12. S. Pattnaik, T. N. Guru Row, R. Lakshmi, A. Devi, J. Goswami, S. A. Shivashankar, S. Chandrasekaran and W. T. Robinson, Acta Cryst. C52 (1996) 891.
13. T. Ozawa, Thermochim. Acta, 174 (1991) 185.