Deconvolution method for two-dimensional spatial-response mapping of lithographic infrared antennas

Applied Optics

Volumn 38, Issue 19, 1999, Pages 3993-4000

  Alda, Javier ^a,b   Fumeaux, Christophe ^a   Codreanu, Iulian ^a   Schaefer, Jason A ^a   Boreman, Glenn D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CARBON DIOXIDE LASERS; COMPUTER SIMULATION; DIPOLE ANTENNAS; ELECTRIC FIELD EFFECTS; ERROR ANALYSIS; FOCUSING; ITERATIVE METHODS; LASER BEAMS; LITHOGRAPHY; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER;

DECONVOLUTION METHOD; MEAN-SQUARED ERROR (MSE) ANALYSIS; METAL-OXIDE-METAL (MOM) DEVICES; SPATIAL-RESPONSE MAPPING;

INFRARED DETECTORS;

EID: 0032613613     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.003993     Document Type: Article

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