Growth and optical waveguiding properties of Rf sputtered lithium niobate thin films on sapphire substrates

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 47-59

  Dogheche, El Hadj ^a   Lansiaux, Xavier ^a   Remiens, Denis ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

Epitaxial film; LiNbO3; Optical waveguiding; Rf sputtering

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; FILM PREPARATION; LITHIUM NIOBATE; MAGNETRON SPUTTERING; OPTICAL WAVEGUIDES; PRESSURE EFFECTS; SAPPHIRE; STOICHIOMETRY; TEMPERATURE; X RAY DIFFRACTION ANALYSIS;

EPITAXIAL QUALITY; RADIO FREQUENCY MAGNETRON SPUTTERING; SAPPHIRE SUBSTRATES;

THIN FILMS;

EID: 0032608147     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210159     Document Type: Article

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