Comprehensive study of the film surface temperature and plasma thermokinetics during La1.85Sr0.15CuO4 deposition by laser ablation

Journal of Applied Physics

Volumn 86, Issue 5, 1999, Pages 2856-2864

  Buzea, Cristina ^a   Wang, Huabing ^a,b   Nakajima, Kensuke ^a,b   Kim, Sang Jae ^a,b   Yamashita, Tsutomu ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; DEPOSITION; LANTHANUM COMPOUNDS; LASER ABLATION; PRESSURE EFFECTS; SUPERCONDUCTING FILMS; THERMAL EFFECTS; THERMODYNAMICS;

LASER DEPOSITION; PLASMA PLUMES;

OXIDE SUPERCONDUCTORS;

EID: 0032608132     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371134     Document Type: Article

References (32)

1. K. L. Saenger, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
2. H. G. Norton and C. B. Carter, Physica C 172, 47 (1990).
3. H. M. Bedekar, A. Safari, and W. Wilber, Physica C 202, 42 (1992).
4. M. C. Foote, B. B. Jones, B. D. Hunt, J. B. Barner, R. P. Vasquez, and L. J. Bajul, Physica C 201, 176 (1992).
5. D. G. Walmsley, H. F. Sakeek, T. Morrow, C. Rowan, and R. J. Turner, Mater. Sci. Eng., B 13, 15 (1992).
6. T. Hase, H. Izumi, K. Ohata, K. Suzuki, T. Morishita, and S. Tanaka, J. Appl. Phys. 68, 374 (1990).
7. D. B. Geohegan, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
8. P. E. Dyer, A. Issa, and P. H. Key, Appl. Surf. Sci. 46, 89 (1990).
9. J. Gonzalo, C. N. Alfonso, and F. Vega, J. Appl. Phys. 77, 6588 (1995).
10. J. C. S. Kools, J. Appl. Phys. 74, 6401 (1993).
11. C. Buzea, H. Myoren, H. B. Wang, K. Nakajima, and T. Yamashita, Spring Meeting of the Japan Society of Applied Physics, Tokyo, Japan, March 12-15, 1998.
12. J. Gonzago, C. N. Afonso, and J. M. Ballesteros, Appl. Surf. Sci. 109/110, 606 (1997).
13. 3 films, grown by pulsed laser ablation in a gas pressure, the refractive index remains nearly constant for pressures up to 75 mTorr, above which a sharp increase is observed. The modifications in the refractive index occur when the films are grown at distances larger than the plume length. Thus, major changes in the refractive index may be improbable in our experiments, as long as the distance target substrate did not exceed the plume length.
14. C. H. Becker and J. B. Pallix, J. Appl. Phys. 64, 5152 (1988).
15. O. Eryu, K. Murakami, K. Masuda, A. Kasuya, and Y. Nishina, Appl. Phys. Lett. 54, 2716 (1989).
16. R. K. Singh, D. Bhattacharya, and J. Narayan, Appl. Phys. Lett. 57, 2022 (1990).
17. P. E. Dyer, S. Farrar, and P. H. Key, Appl. Phys. Lett. 60, 1890 (1992).
18. B. Y. Man, X. T. Wang, and A. H. Liu, J. Appl. Phys. 83, 3509 (1998).
19. F. P. Gagliano and U. C. Paek, Appl. Opt. 13, 274 (1974).
20. J. F. Ready, J. Appl. Phys. 36, 462 (1965).
21. T. Venkatesan, X. D. Wu, A. Inam, Y. Jeon, M. Croft, E. W. Chase, C. C. Chang, J. B. Watchman, R. W. Oden, F. Radicati di Bronzolo, and C. A. Magee, Appl. Phys. Lett. 53, 1431 (1988).
22. M. von Allmen, Laser-Beam Interactions with Materials (Springer, Berlin, 1987).
23. T. Cheung and H. Sankur, CRC Crit. Rev. Solid State Mater. Sci. 15, 63 (1988).
24. T. Venkatesan, X. D. Wu, A. Inam, and J. B. Wachtman, Appl. Phys. Lett. 52, 1193 (1988).
25. S. Otsubo, T. Minamikawa, Y. Yonezawa, A. Morimoto, and T. Shimizu, Jpn. J. Appl. Phys., Part 2 29, L73 (1990).
26. G. Koren, A. Gupta, R. J. Baseman, M. I. Lutwyche, and R. B. Laibowitz, Appl. Phys. Lett. 55, 2450 (1989).
27. J. P. Zheng, Z. Q. Huang, D. T. Shaw, and H. S. Kwok, Appl. Phys. Lett. 54, 280 (1989).
28. J. P. Zheng, Z. H. Huang, Q. Y. Ying, S. Witanachchi, D. T. Shaw, and H. S. Kwok, Appl. Phys. Lett. 54, 954 (1989).
29. J. C. S. Kools, S. H. Brongersman, E. van de Riet, and J. Dieleman, Appl. Phys. Lett. 55, 2345 (1989).
30. C. E. Otis and R. W. Dreyfus, Phys. Rev. Lett. 67, 2102 (1991).
31. D. Fried, G. P. Peck, T. Kushida, and E. W. Rothe, J. Phys. D 24, 1065 (1991).
32. D. B. Geohegan, Appl. Phys. Lett. 60, 2732 (1992).