Input power dependence of growth rate and quality of diamond films deposited in a d.c. arcjet system

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 211-214

  Tang, W Z ^a   Zhong, G F ^a   Shen, F Z ^a   Lu, F X ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

CVD; D.c. arcjet plasma; Diamond films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; METHANE; PLASMA JETS; PLASMA TORCHES; THIN FILMS;

ARCJET PLASMA CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0032607984     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00300-8     Document Type: Article

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