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Volumn 86, Issue 2, 1999, Pages 995-998
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Microstructure evolution study of Pd-Ge ohmic contact formation on GaAs
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
ANNEALING;
CRYSTAL MICROSTRUCTURE;
DIFFERENTIAL SCANNING CALORIMETRY;
EPITAXIAL GROWTH;
INTERDIFFUSION (SOLIDS);
OHMIC CONTACTS;
PALLADIUM ALLOYS;
REACTION KINETICS;
SEMICONDUCTOR GROWTH;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
CONSTANT HEATING RATE DIFFERENTIAL SCANNING CALORIMETRY;
CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY;
SOLID-STATE REACTIONS;
SEMICONDUCTING GALLIUM ARSENIDE;
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EID: 0032607016
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.370837 Document Type: Article |
Times cited : (6)
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References (15)
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