Mass resolved ion energy distributions in dual-mode microwave/radio frequency plasma

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1999, Pages 311-315

  Hallil, A ^a   Zabeida, O ^a   Klemberg Sapieha, J E ^a   Wertheimer, M R ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON ENERGY LEVELS; FREQUENCIES; GASES; IONS; MASS SPECTROMETERS; NITROGEN; PRESSURE EFFECTS; SURFACES;

ENERGY ANALYZER; ION ENERGY DISTRIBUTION FUNCTIONS; MICROWAVE PLASMA; RADIO FREQUENCY PLASMA;

PLASMAS;

EID: 0032606890     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)