Toward subnanometer uncertainty in interferometric length measurements of short gauge blocks

Applied Optics

Volumn 38, Issue 1, 1999, Pages 101-112

  Malinovsky, Igor ^a   Titov, Alexander ^a   Augusto Dutra, Jorge ^a   Belaïdi, Hakima ^a   Dos Santos França, Ricardo ^a   Alberto Massone, Carlos ^a  

^a National Institute of Metrology   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPARATORS (OPTICAL); FOURIER TRANSFORMS; GAGE BLOCKS; MEASUREMENT ERRORS; NANOTECHNOLOGY; OPTICAL VARIABLES MEASUREMENT; REFLECTION; REFRACTIVE INDEX; SPATIAL VARIABLES MEASUREMENT;

INTERFEROMETRIC LENGTH MEASUREMENT; SUBNANOMETER UNCERTAINTY;

INTERFEROMETRY;

EID: 0032606840     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.000101     Document Type: Article

References (12)

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