Fully integrated embedded DRAM technologies with high performance logic and commodity DRAM cells for system-on-a-chip

International Symposium on VLSI Technology, Systems, and Applications, Proceedings

Volumn , Issue , 1999, Pages 243-246

  Koike, H ^a   Takato, H ^a   Hiyama, K ^a   Yoshida, S ^a   Harakawa, H ^a   Kokubun, K ^a   Shimabukuro, T ^a   Kato, S ^a   Tamaoki, M ^a   Okano, H ^a   Sato, H ^a   Morimasa, Y ^a   Yamamoto, T ^a   Tanaka, M ^a   Kumagai, J ^a   et al , ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CELLULAR ARRAYS; EMBEDDED SYSTEMS; LOGIC CIRCUITS; MOSFET DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; THIN FILMS;

BIT LINE CONTACT; CAPACITOR CELL; EMBEDDED DRAM TECHNOLOGY; SALICIDATION;

DYNAMIC RANDOM ACCESS STORAGE;

EID: 0032599159     PISSN: 1524766X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)