Stresses in 3C-SiC films grown on Si substrates

IEEE Semiconducting and Semi-Insulating Materials Conference, SIMC

Volumn , Issue , 1999, Pages 275-278

  Jacob, Chacko ^a   Pirouz, Pirouz, ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; PRESSURE; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON; STRESSES; SUBSTRATES; TENSILE STRESS;

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; LATTICE MISMATCH; LOAD DEFLECTION TECHNIQUE;

SEMICONDUCTING FILMS;

EID: 0032598487     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)