Terminal iterative learning control with an application to RTPCVD thickness control

Automatica

Volumn 35, Issue 9, 1999, Pages 1535-1542

  Jian Xin, Xu ^a   Chen, Yangquan ^a   Tong Heng, Lee ^a   Yamamoto, Shigehiko ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ASYMPTOTIC STABILITY; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DISCRETE TIME CONTROL SYSTEMS; LEARNING SYSTEMS; LINEAR CONTROL SYSTEMS; RAPID THERMAL ANNEALING; SEMICONDUCTOR DEVICE MANUFACTURE; SPATIAL VARIABLES CONTROL; THICKNESS CONTROL;

DISCRETE TIME LINEAR SYSTEM; HIGH ORDER SCHEME; ITERATIVE LEARNING CONTROL; RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION; TERMINAL OUTPUT TRACKING;

INTELLIGENT CONTROL;

EID: 0032598174     PISSN: 00051098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0005-1098(99)00076-X     Document Type: Article

References (19)

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16. Dr Xu Jian-Xin got his Ph.D. from Tokyo University in 1989. He spent one year in Hitachi Research Laboratory as a Research Engineer and another one year in the Dept. of Electrical Engineering, Ohio State University, USA, as a Research Fellow. Since 1991, he has been with the EE Dept. of National University of Singapore and is now a Senior Lecturer. His major research interests include Variable Structure Control, Fuzzy Logic Control/Genetic Algorithms, Adaptive/Robust Control and, in particular, Iterative/Repetitive Learning Control.
17. Yangquan Chen was born in Jiangsu, China in 1966. He received his B.Eng. in Industrial Automation from University of Science and Technology of Beijing (USTB: previously Beijing University of Iron and Steel Technology) in 1985 and his M.Eng. in Automatic Control from Beijing Institute of Technology (BIT) in January 1989. In the periods 87.7-87.10 and 87.10-88.6, he visited the Space Research Corporation (SRC, Belgium) and was invited to BIT, respectively, as a guest researcher for flying vehicle projects. From 1987 to 1995, he had been with the Department of Electrical Engineering of Xi'an Institute of Technology (XIT) where he conducted more than 10 engineering research projects, published more than 30 articles in flying vehicle engineering and automatic control theory, and received several ministerial honors. He had served as a Dept. Director since 1992 and an Associate Professor since 1994 during his stay in XIT. Since 1995, he has been a Ph.D. candidate in the School of EEE, Nanyang Technological University, Singapore. He joined the Dept. of Electrical Engineering, National University of Singapore in 1996 for research projects related to learning control applications. His current research interests include iterative/ repetitive/adaptive learning control, curve identification, robot control, batch process control, optimization, optimal control problem solver etc. His homepage is at http://shuya.home.ml.org/ ̃ yqchen or http://www.ee.nus.sg/ ̃ yangquan.
18. T.H. Lee received the B.A. degree with First Class Honours in the Engineering Tripos from Cambridge University, England, in 1980, and the Ph.D. degree from Yale University in 1987. Currently, he is an Associate Professor and Head of the Control Division at the Department of Electrical Engineering of the National University of Singapore. His research interests are in the areas of adaptive systems, knowledge-based control and intelligent mechatronics. Dr. Lee was a recipient of the Cambridge University Charles Baker Prize in Engineering.
19. Dr. Shigehiko Yamamoto graduated from Kyoto University Electronics Department. He worked for Yokogawa Electric Corporation for 34 years where he was engaged in the engineering of process control systems, development of paper machine control systems, development of process control systems using modern control techniques, etc. He got Doctor of Engineering from Kyoto University in 1988. He became a professor of Electronic Control Engineering of Niihama National College of Technology in 1994. Since 1995 he has been a professor of Mechanical Engineering Department of Kogakuin University. Currently he is also a visiting Professor of National University of Singapore. His research interests include control of paper machines, control of chemical processes and development of intelligent control systems.