Multichannel averaging phasemeter for picometer precision laser metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3740, Issue , 1999, Pages 646-649

  Halverson, Peter G ^a   Johnson, Donald R ^a   Kuhnert, Andreas ^a   Shaklan, Stuart B ^a   Spero, Robert ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTANCE MEASUREMENT; FIELD PROGRAMMABLE GATE ARRAYS; LASER APPLICATIONS; PHASE METERS;

HETERODYNE INTERFEROMETRY; LASER INTERFEROMETRY; PICOMETER PRECISION LASER METROLOGY;

INTERFEROMETERS;

EID: 0032596815     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)