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Volumn 2, Issue , 1999, Pages 803-805
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Design and construction of a mechanical radiation detector
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE MEASUREMENT;
CHEMICAL VAPOR DEPOSITION;
DEFLECTION (STRUCTURES);
DESIGN;
MECHANICAL VARIABLES MEASUREMENT;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONIC PROCESSING;
RADIATION EFFECTS;
SILICON NITRIDE;
STRESSES;
THIN FILMS;
MECHANICAL RADIATION DETECTOR;
MICROELECTRONIC FABRICATION TECHNIQUES;
MICROMECHANICAL LEVERS;
POLYSILICON;
RADIATION IMPACT;
SILICON NITRIDE LAYERS;
STRESS BALANCE;
RADIATION DETECTORS;
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EID: 0032596534
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (4)
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References (6)
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