Self-aligned offset polysilicon thin-film transistor using photoresist reflow

IEEE Electron Device Letters

Volumn 20, Issue 9, 1999, Pages 476-477

  Han, Jung In ^a   Han, Chul Hi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

LEAKAGE CURRENTS; PHOTORESISTS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

PHOTORESIST REFLOW;

THIN FILM TRANSISTORS;

EID: 0032595844     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.784457     Document Type: Article

References (8)

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