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Volumn 38, Issue 7 A, 1999, Pages
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Formation of H*2 by electron-irradiation of hydrogenated Si
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
BORON;
CARBON;
DOPING (ADDITIVES);
ELECTRON ENERGY LEVELS;
ELECTRON IRRADIATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROGEN;
HYDROGENATION;
LIGHT ABSORPTION;
LIGHT MEASUREMENT;
QUENCHING;
FRENKEL PAIR;
SILICON;
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EID: 0032594944
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.38.l758 Document Type: Article |
Times cited : (3)
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References (13)
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