Silicon based nanometric oscillator for scanning force microscopy operating in the 100 MHz range

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 6 B, 1999, Pages 3962-3965

  Kawakatsu, Hideki ^a   Toshiyoshi, Hiroshi ^a   Saya, Daisuke ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MASKS; NATURAL FREQUENCIES; OSCILLATORS (MECHANICAL); SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

NANOMETRIC OSCILLATORS; SCANNING FORCE MICROSCOPY;

ATOMIC FORCE MICROSCOPY;

EID: 0032594486     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.3962     Document Type: Article

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