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Diamond and Related Materials

Volumn 8, Issue 8-9, 1999, Pages 1388-1392

Simulations of the hot-filament diamond CVD gas-phase environment: Direct comparison with experimental measurements

(4) Tsang, R S a May, P W a Cole, J a Ashfold, M N R a

a UNIVERSITY OF BRISTOL (United Kingdom)

Author keywords

CHEMKIN; CVD; Gas phase environment

Indexed keywords

ATOMS; CHEMICAL REACTORS; COMPUTER SIMULATION; DIAMOND FILMS; HYDROGEN; MASS SPECTROMETRY; PHASE COMPOSITION; TEMPERATURE;

GAS PHASE CHEMISTRY; HOT FILAMENT; IN SITU MOLECULAR BEAM MASS SPECTROMETRY; MOLE FRACTION;

CHEMICAL VAPOR DEPOSITION;

EID: 0032594412 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(99)00018-7 Document Type: Article

Times cited : (13)

References (28)

1
- 12044250454
- M.N.R. Ashfold, P.W. May, C.A. Rego, N.M. Everitt, Chem. Soc. Rev. 23 (1994) 21.
- (1994) Chem. Soc. Rev. , vol.23 , pp. 21
- Ashfold, M.N.R.¹ May, P.W.² Rego, C.A.³ Everitt, N.M.⁴

2
- 0001232323
- L.R. Martin, M.W. Hill, Appl. Phys. Lett. 55 (1989) 2248.
- (1989) Appl. Phys. Lett. , vol.55 , pp. 2248
- Martin, L.R.¹ Hill, M.W.²

3
- 0001083558
- E.H. Wahl, T.G. Owano, C.H. Kruger, P. Zalicki, Y. Ma, R.N. Zare, Diamond Relat. Mater. 5 (1996) 373.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 373
- Wahl, E.H.¹ Owano, T.G.² Kruger, C.H.³ Zalicki, P.⁴ Ma, Y.⁵ Zare, R.N.⁶

4
- 36449006980
- L. Schäfer, C.P. Klages, U. Meier, K. Kohse-Hoinghaus, Appl. Phys. Lett. 58 (1991) 571.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 571
- Schäfer, L.¹ Klages, C.P.² Meier, U.³ Kohse-Hoinghaus, K.⁴

5
- 0001098767
- F.G. Celii, J.E. Butler, Appl. Phys. Lett. 54 (1989) 1031.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 1031
- Celii, F.G.¹ Butler, J.E.²

6
- 0343814229
- W.L. Hsu, J. Appl. Phys. 72 (1992) 3102.
- (1992) J. Appl. Phys. , vol.72 , pp. 3102
- Hsu, W.L.¹

7
- 25144482161
- M.C. McMaster, W.L. Hsu, M.E. Coltrin, D.S. Dandy, C. Fox, Diamond Relat. Mater. 4 (1995) 1000.
- (1995) Diamond Relat. Mater. , vol.4 , pp. 1000
- McMaster, M.C.¹ Hsu, W.L.² Coltrin, M.E.³ Dandy, D.S.⁴ Fox, C.⁵

8
- 0028404901
- W.L. Hsu, M.C. McMaster, M.E. Coltrin, D.S. Dandy, Jpn. J. Appl. Phys. 33 (1994) 2231.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 2231
- Hsu, W.L.¹ McMaster, M.C.² Coltrin, M.E.³ Dandy, D.S.⁴

9
- 0000897322
- R.S. Tsang, C.A. Rego, P.W. May, J. Thumim, M.N.R. Ashfold, K.N. Rosser, C.M. Younes, M.J. Holt, Diamond Relat. Mater. 5 (1996) 359.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 359
- Tsang, R.S.¹ Rego, C.A.² May, P.W.³ Thumim, J.⁴ Ashfold, M.N.R.⁵ Rosser, K.N.⁶ Younes, C.M.⁷ Holt, M.J.⁸

10
- 0001343955
- C.A. Rego, R.S. Tsang, P.W. May, M.N.R. Ashfold, K.N. Rosser, J. Appl. Phys. 79 (1996) 7264.
- (1996) J. Appl. Phys. , vol.79 , pp. 7264
- Rego, C.A.¹ Tsang, R.S.² May, P.W.³ Ashfold, M.N.R.⁴ Rosser, K.N.⁵

11
- 0000284527
- R.S. Tsang, C.A. Rego, P.W. May, M.N.R. Ashfold, K.N. Rosser, Diamond Relat. Mater. 6 (1997) 247.
- (1997) Diamond Relat. Mater. , vol.6 , pp. 247
- Tsang, R.S.¹ Rego, C.A.² May, P.W.³ Ashfold, M.N.R.⁴ Rosser, K.N.⁵

12
- 0348155100
- Ph.D. thesis, School of Chemistry, University of Bristol, UK
- R.S. Tsang, Ph.D. thesis, School of Chemistry, University of Bristol, UK, 1997.
- (1997)
- Tsang, R.S.¹

13
- 0003641977
- M.A. Prelas, G. Popovici, L.K. Bigelow (Eds.), Marcel Dekker, New York
- D.G. Goodwin, J.E. Butler, in: M.A. Prelas, G. Popovici, L.K. Bigelow (Eds.), Handbook of Industrial Diamonds and Diamond Films, Marcel Dekker, New York, 1998.
- (1998) Handbook of Industrial Diamonds and Diamond Films
- Goodwin, D.G.¹ Butler, J.E.²

14
- 0004130323
- R.J. Kee, F.M. Rupley, J.A. Miller, Sandia National Laboratories Report SAND89-8009B, (1989)
- (1989) Sandia National Laboratories Report SAND89-8009B
- Kee, R.J.¹ Rupley, F.M.² Miller, J.A.³

15
- 33645656760
- M.E. Coltrin, D.S. Dandy, J. Appl. Phys. 74 (1993) 5803.
- (1993) J. Appl. Phys. , vol.74 , pp. 5803
- Coltrin, M.E.¹ Dandy, D.S.²

16
- 0001539466
- D.G. Goodwin, G.G. Gavillet, J. Appl. Phys. 68 (1990) 6393.
- (1990) J. Appl. Phys. , vol.68 , pp. 6393
- Goodwin, D.G.¹ Gavillet, G.G.²

17
- 0000407485
- D.S. Dandy, M.E. Coltrin, J. Appl. Phys. 76 (1994) 3102.
- (1994) J. Appl. Phys. , vol.76 , pp. 3102
- Dandy, D.S.¹ Coltrin, M.E.²

18
- 0040969641
- D.G. Goodwin, Appl. Phys. Lett. 59 (1991) 277.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 277
- Goodwin, D.G.¹

19
- 0028417093
- T. Lang, J. Laimer, H. Störi, Diamond Relat. Mater. 3 (1994) 470.
- (1994) Diamond Relat. Mater. , vol.3 , pp. 470
- Lang, T.¹ Laimer, J.² Störi, H.³

20
- 36549093323
- S.J. Harris, A.M. Weiner, T.A. Perry, Appl. Phys. Lett. 53 (1988) 1605.
- (1988) Appl. Phys. Lett. , vol.53 , pp. 1605
- Harris, S.J.¹ Weiner, A.M.² Perry, T.A.³

21
- 0040284614
- S.J. Harris, J. Appl. Phys. 65 (1989) 3045.
- (1989) J. Appl. Phys. , vol.65 , pp. 3045
- Harris, S.J.¹

22
- 0027390669
- E. Meeks, R.J. Kee, D.S. Dandy, M.E. Coltrin, Combust. Flame 92 (1993) 144.
- (1993) Combust. Flame , vol.92 , pp. 144
- Meeks, E.¹ Kee, R.J.² Dandy, D.S.³ Coltrin, M.E.⁴

23
- 0027571745
- K.Y. Lee, M.H. Yang, I.K. Puri, Combust. Flame 92 (1993) 419.
- (1993) Combust. Flame , vol.92 , pp. 419
- Lee, K.Y.¹ Yang, M.H.² Puri, I.K.³

24
- 0020735359
- G. Leyendecker, J. Doppelbauer, D. Bauerle, P. Geittner, H. Lydtin, Appl. Phys. A 30 (1983) 237.
- (1983) Appl. Phys. A , vol.30 , pp. 237
- Leyendecker, G.¹ Doppelbauer, J.² Bauerle, D.³ Geittner, P.⁴ Lydtin, H.⁵

25
- 84975655837
- U. Meier, K. Kohse-Hoinghaus, L. Schäfer, C.P. Klages, Appl. Opt. 29 (1990) 4993.
- (1990) Appl. Opt. , vol.29 , pp. 4993
- Meier, U.¹ Kohse-Hoinghaus, K.² Schäfer, L.³ Klages, C.P.⁴

26
- 0346894577
- Tashkent, October SPIE Proc., in press
- S.A. Redman, S.R. Langford, K.N. Rosser, M.N.R. Ashfold, in: Proc. Int. Conf. Lasers in Synthesis, Characterisation and Processing of Diamond, Tashkent, October 1997, SPIE Proc., in press.
- (1997) Proc. Int. Conf. Lasers in Synthesis, Characterisation and Processing of Diamond
- Redman, S.A.¹ Langford, S.R.² Rosser, K.N.³ Ashfold, M.N.R.⁴

27
- 36449002841
- L.L. Connell, J.W. Fleming, H.N. Chu, D.J. Vestyck Jr., E. Jensen, J.E. Butler, J. Appl. Phys. 78 (1995) 3622.
- (1995) J. Appl. Phys. , vol.78 , pp. 3622
- Connell, L.L.¹ Fleming, J.W.² Chu, H.N.³ Vestyck D.J., Jr.⁴ Jensen, E.⁵ Butler, J.E.⁶

28
- 0005456656
- in press
- S.M. Leeds, P.W. May, Diamond Relat. Mater., in press.
- Diamond Relat. Mater.
- Leeds, S.M.¹ May, P.W.²

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