Physical vapor deposition of multi-layered lead-zirconate-titanate films for ultrasonic transducer fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3664, Issue , 1999, Pages 221-228

  Kline Schoder, Robert ^a   Kynor, David ^a   Jaeger, Michael ^a   Winder, Alan ^a   Desilets, Charles ^a  

^a CREARE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD COMPOUNDS; SPUTTER DEPOSITION; VAPOR DEPOSITION;

MICROFABRICATION TECHNIQUES; PHYSICAL VAPOR DEPOSITION;

ULTRASONIC TRANSDUCERS;

EID: 0032593499     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (3)