SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 541, Issue , 1999, Pages 635-640

Pulsed laser deposition of piezoelectric films for micro-fluidic applications

(7) Kim, W J a Rife, J C b Horwitz, J S b Auyeung, R C Y a Chrisey, D B b Bell, M I b Smith, R W c

a SFA INC (United States)

b NAVAL RESEARCH LABORATORY (United States)

c UNIVERSITY OF NEBRASKA AT OMAHA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; BARIUM TITANATE; CRYSTAL ORIENTATION; FILM GROWTH; MICROCONTROLLERS; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; POLYCRYSTALLINE MATERIALS; PULSED LASER APPLICATIONS; SUBSTRATES; ZINC OXIDE;

FLUIDIC CIRCUITS; PIEZOELECTRIC FILMS; PROGRAMMABLE MICROFLUIDIC CONTROLLER; PULSED LASER DEPOSITION;

THICK FILMS;

EID: 0032592273 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Article

Times cited : (2)

References (12)

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