A novel approach to gaseous field ion sources for focused ion beam applications

Ultramicroscopy

Volumn 79, Issue 1-4, 1999, Pages 225-230

  Miller, M K ^a   Sijbrandij, S J ^a  

^a Microsc Microanalytical Sci Grp   (United States)

Author keywords

Focused ion sources; Gaseous field ion sources

Indexed keywords

NANOPARTICLE;

ARTICLE; CONTROLLED STUDY; EVAPORATION; FIELD EMISSION; GAS; IMAGING; ION CURRENT; MEASUREMENT; METHODOLOGY; MICROSCOPE; NONHUMAN; PRECIPITATION; VACUUM;

CURRENT DENSITY; ION BEAMS;

FOCUSED ION SOURCES; GASEOUS FIELD ION SOURCES;

ION SOURCES;

EID: 0032586234     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(99)00063-7     Document Type: Article

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