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Volumn 72, Issue 26, 1998, Pages 3408-3410

Electroluminescence from Si/Si oxynitride superlattices

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENTS; FILM GROWTH; GOLD; MAGNETRON SPUTTERING; SILICON COMPOUNDS; SILICON WAFERS; SUBSTRATES; SUPERLATTICES; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032577753     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121648     Document Type: Article
Times cited : (10)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.