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Volumn 72, Issue 26, 1998, Pages 3408-3410
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Electroluminescence from Si/Si oxynitride superlattices
a a b b a,c |
Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC CURRENTS;
FILM GROWTH;
GOLD;
MAGNETRON SPUTTERING;
SILICON COMPOUNDS;
SILICON WAFERS;
SUBSTRATES;
SUPERLATTICES;
X RAY PHOTOELECTRON SPECTROSCOPY;
RECTIFYING JUNCTION;
SILICON OXYNITRIDE;
ELECTROLUMINESCENCE;
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EID: 0032577753
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.121648 Document Type: Article |
Times cited : (10)
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References (18)
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