Ion-chromatographic study of interactions in HF-H3PO4-HNO3 semiconductor etchants. Systematic use of statistically designed mixture experiments

Journal of Chromatography A

Volumn 804, Issue 1-2, 1998, Pages 161-169

  Vanatta, L E ^a   Coleman, D E ^b  

^a AIR LIQUIDE   (France)

^b ALCOA TECHNICAL CENTER   (United States)

Author keywords

Acids; Etchants; Experimental design; Hydrofluoric acid; Nitric acid; Orthophosphoric acid

Indexed keywords

HYDROFLUORIC ACID; NITRIC ACID DERIVATIVE; PHOSPHORIC ACID;

ANALYTIC METHOD; CONFERENCE PAPER; DATA ANALYSIS; EQUILIBRIUM CONSTANT; EXPLANT; ION PAIR CHROMATOGRAPHY; MOLECULAR INTERACTION; NONHUMAN; PRIORITY JOURNAL; SEMICONDUCTOR; STATISTICAL ANALYSIS;

EID: 0032562624     PISSN: 00219673     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-9673(97)01264-8     Document Type: Conference Paper

References (5)

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2. C.A. Jacobson, Encyclopedia of Chemical Reactions, Vol. 5, Chapman and Hall, New York, 1953, p. 340.
3. Shamakhova N.N., Plakhotnik V.N., Il'in E.G. Koord. Khim. 15:1989;1504.
4. Coleman D.E., Montgomery D.C. Technometrics. 35:1993;1.
5. Design and Analysis of Experiments Using JMP Software, Course Notes, SAS Institute, Cary, NC, 1995, Ch. 5.