Ballistic electron emission microscopy study of barrier height inhomogeneities introduced in Au/n-Si Schottky contacts by a HF pretreatment

Journal of Applied Physics

Volumn 84, Issue 6, 1998, Pages 3226-3231

  Detavernier, C ^a   Van Meirhaeghe, R L ^a   Donaton, R ^b   Maex, K ^b,c   Cardon, F ^d  

^a GHENT UNIVERSITY   (Belgium)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

^d Department of Solid State Sciences ^*  (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CONTACTS; GOLD; METHANOL; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON; SUBSTRATES; WATER; X RAY PHOTOELECTRON SPECTROSCOPY;

BALLISTIC ELECTRON EMISSION SPECTROSCOPY; DEIONIZED WATER; SCHOTTKY BARRIER HEIGHTS;

ELECTRON MICROSCOPY;

EID: 0032529983     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368475     Document Type: Article

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