An integrable nozzle for monolithic microfluidic devices

Sensors and Actuators, A: Physical

Volumn 65, Issue 2-3, 1998, Pages 221-227

  Babaei, Jafar Haji ^a   Kwok, Chee Yee ^a   Huang, Ruey Shing ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Integrable nozzles; Microfluidic devices; Monolithic devices

Indexed keywords

ANISOTROPY; ETCHING; FLOW MEASUREMENT; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; ORIFICES; POTASSIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

INTEGRABLE NOZZLES; INTEGRATED MICROFLUIDIC DEVICES;

NOZZLES;

EID: 0032520425     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(97)01664-6     Document Type: Article

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