Laser ablation doping process for the synthesis of conductive diamond thin film

Thin Solid Films

Volumn 322, Issue 1-2, 1998, Pages 28-32

  Gaze, Joseph ^a   Oyanagi, Naoki ^a   Yamamoto, Isamu ^a   Izawa, Hirosumi ^a  

^a Resonac Corporation   (Japan)

Author keywords

CO2 laser; Conductive diamond; Solid boron

Indexed keywords

BORON; CARBON DIOXIDE LASERS; CARRIER CONCENTRATION; CONDUCTIVE FILMS; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY MEASUREMENT; HALL EFFECT; HIGH TEMPERATURE EFFECTS; LASER ABLATION; SECONDARY ION MASS SPECTROMETRY; SYNTHESIS (CHEMICAL); THIN FILMS;

ACTIVATED BEAM DEPOSITION;

DIAMOND FILMS;

EID: 0032496541     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)01016-X     Document Type: Article

References (5)

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4. M. Deguchi, M. Kitabatake, T. Hirao, Y. Mori, A. Hatta, T. Ito, A. Hiraki, Japan New Diamond Forum, 8th Diamond Symposium, p. 6.
5. J. Cifre, J. Puigdollers, M.C. Polo, J. Esteve, Diamond Rel. Mater. 3 (1994) 629.