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Volumn 418, Issue 2, 1998, Pages 466-478

The adsorption of nickelocene Part 2: Decomposition and selective area deposition

Author keywords

Adsorption; Molecular adsorption and surface decomposition; Organometallics; Surface photolysis

Indexed keywords

DECOMPOSITION; DEPOSITION; DESORPTION; ELECTRON BEAMS; NICKEL COMPOUNDS; PHOTOLYSIS; SURFACES;

EID: 0032488149     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00742-0     Document Type: Article
Times cited : (16)

References (102)
  • 11
    • 0020911326 scopus 로고
    • Laser Diagnostics and Photochemical Processing for Semiconductor Devices
    • R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (Eds.)
    • D. Bauerle, in: R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (Eds.), Laser Diagnostics and Photochemical Processing for Semiconductor Devices, Mater. Res. Soc. Symp. Proc. 17 (1983) 19.
    • (1983) Mater. Res. Soc. Symp. Proc. , vol.17 , pp. 19
    • Bauerle, D.1
  • 13
    • 0020911326 scopus 로고
    • Laser Diagnostics and Photochemical Processing for Semiconductor Devices
    • R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (Eds.)
    • I.P. Herman, R.A. Hyde, B.M. McWilliams, A.H. Weisberg, L.L. Wood, in: R.M. Osgood, S.R.J. Brueck, H.R. Schlossberg (Eds.), Laser Diagnostics and Photochemical Processing for Semiconductor Devices, Mater. Res. Soc. Symp. Proc. 17(1983) 119.
    • (1983) Mater. Res. Soc. Symp. Proc. , vol.17 , pp. 119
    • Herman, I.P.1    Hyde, R.A.2    McWilliams, B.M.3    Weisberg, A.H.4    Wood, L.L.5
  • 39
    • 0001667422 scopus 로고
    • K.D. Karlin (Ed.), Wiley, New York
    • J.T. Spencer, in: K.D. Karlin (Ed.), Progress in Inorganic Chemistry, vol. 41, Wiley, New York, 1994, p. 145.
    • (1994) Progress in Inorganic Chemistry , vol.41 , pp. 145
    • Spencer, J.T.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.