Characterization of film interface integrity through scanning acoustic microscopy

Surface and Coatings Technology

Volumn 105, Issue 1-2, 1998, Pages 1-7

  Parthasarathi, Sanjai ^a   Tittmann, Bernhard R ^a   Nishida, Masahiro ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Diamond films; Interface integrity; Scanning acoustic microscopy; Thin films and coatings

Indexed keywords

ACOUSTIC MICROSCOPES; ADHESION; DIAMOND FILMS; FRACTURE MECHANICS; INTERFACES (MATERIALS); MICROSCOPIC EXAMINATION; POLYCRYSTALLINE MATERIALS; TITANIUM NITRIDE;

SCANNING ACOUSTIC MICROSCOPY (SAM);

COATINGS;

EID: 0032486013     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00484-8     Document Type: Article

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