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Volumn 72, Issue 1, 1998, Pages 31-33
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X-ray photoelectron spectroscopy study of excimer laser treated alumina films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
CRYSTAL STRUCTURE;
EXCIMER LASERS;
FILM PREPARATION;
LASER BEAMS;
NUMERICAL METHODS;
SEMICONDUCTING SILICON;
SINGLE CRYSTALS;
SPECTROMETERS;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
ELECTRON BEAM EVAPORATION;
ELECTRON GUN EVAPORATION;
EXCIMER LASER IRRADIATION;
LOW INCIDENCE ANGLE X RAY DIFFRACTION;
THIN FILMS;
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EID: 0032484442
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.120636 Document Type: Article |
Times cited : (3)
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References (10)
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