The mechanical properties of DLC and fluorinated DLC films deposited using unbalanced magnetron sputter ion plating method

Scripta Materialia

Volumn 39, Issue 7, 1998, Pages 839-845

  Choy, Kwang Leong ^a   Zhao, Jiansheng ^a,b  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BOND STRENGTH (MATERIALS); CRACKING (CHEMICAL); CRYSTAL STRUCTURE; FAILURE ANALYSIS; FLUORINE; LOADS (FORCES); MECHANICAL PROPERTIES; SPUTTER DEPOSITION; STRESSES; SURFACE PROPERTIES; TESTING;

CHIPPING; CLOSED FIELD UNBALANCED SPUTTER ION PLATING METHOD; DIAMOND LIKE CARBON; FLAKING; FRICTIONAL COEFFICIENT; SCRATCH TEST;

DIAMOND FILMS;

EID: 0032483226     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(98)00265-6     Document Type: Article

References (7)

1. R. E. Sah and B. Dischier, Appl. Phys. Lett. 46, 739 (1985).
2. R. E. Sah, Thin Solid Films. 167, 255 (1988).
3. U. Muller and R. Hauert, Surf. Coatings Technol. 76-77, 367 (1995).
4. S. S. Ang and G. Sreenivas, J. Electron. Mater. 22, 347 (1993).
5. Tayshree, Setch, and S. V. Babu, Thin Solid Films. 230, 90 (1993).
6. K. J. A. Brookes, World Directory and Handbook of Hardmetals. Engineering Digest and International Carbide Data of UK (1982).
7. Z. Jiansheng et al., Chin. J. Mech. Eng. (English edition), Dec. (1991).