SiC formation and influence on the morphology of polycrystalline silicon thin films on graphite substrates produced by zone melting recrystallization

Thin Solid Films

Volumn 326, Issue 1-2, 1998, Pages 175-179

  Hauttmann, S ^a   Kunze, T ^a   Muller J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Crystallization; Graphite; Silicon carbide; Surface morphology

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLIZATION; MELTING; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SILICON CARBIDE;

ZONE MELTING RECRYSTALLIZATION;

THIN FILMS;

EID: 0032482851     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00523-9     Document Type: Article

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