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Volumn 195, Issue 1-4, 1998, Pages 192-198
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Growth and in situ monitoring of GaN using IR interference effects
a a a b b b b c c c |
Author keywords
Close spaced vertical reactor; GaN; Interferometry; MOVPE
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Indexed keywords
INFRARED RADIATION;
INTERFEROMETRY;
LIGHT INTERFERENCE;
METALLORGANIC VAPOR PHASE EPITAXY;
SEMICONDUCTOR GROWTH;
CLOSE-SPACED VERTICAL REACTORS;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0032477170
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(98)00567-3 Document Type: Article |
Times cited : (9)
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References (10)
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