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Volumn 241, Issue 2-3, 1998, Pages 190-194

Formation of electronic conducting amorphous WO3 thin films by ion implantation

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY; ION IMPLANTATION; OXIDES; THIN FILMS; TUNGSTEN COMPOUNDS;

CARRIER GENERATION; TUNGSTEN OXIDES;

AMORPHOUS FILMS;

EID: 0032476432 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(98)00805-9 Document Type: Article

Times cited : (10)

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